Patterning Cleans

Surface Preparation and Cleans (SP&C) are integral processes in semiconductor manufacturing, ensuring the purity and precision required for advanced electronic devices.

Solutions built for the future

We are an innovative partner, that enables targeted etch and cleaning solutions for effective cleans of next-generation devices. Our comprehensive and customized solutions ensure high-quality cleans and etch technology for precise and efficient semiconductor manufacturing. 

What We Offer for Surface Preparation and Cleaning

Surface Preparation and Cleans (SP&C) are integral processes in semiconductor manufacturing, ensuring the purity and precision required for advanced electronic devices. These processes involve the meticulous removal of contaminants and residues from semiconductor wafers, which is crucial for the performance and reliability of microprocessors, memory, and logic chips.

Our SP&C solutions play a vital role in preparing the wafer surfaces for subsequent patterning and etching steps. This begins with advanced wet etch techniques, photoresist removal, and post etch residue cleaning, which are essential for achieving the high-quality surfaces needed for next-generation semiconductor devices.

Our Portfolio

We offer a well-rounded portfolio of Surface Preparation and Cleans solutions, positioning us as an innovative partner to advance the semiconductor manufacturing process.

Our expertise includes selective etchants for cutting edge applications, photoresist and post etch residue removal in Back End of Line (BEOL) cleans, photoresist and residue removal in Advanced Packaging applications.

We offer broad application support in various areas, including Advanced Selective Etch, BEOL cleans, photoresist removal, and cleans for Advanced Packaging.

We leverage our exceptional R&D capabilities to drive constant innovation towards efficient cleaning solutions.


 
Patterning Solutions                                                                                                              Process Enhancement Solutions

Process Materials
                                                                        
Cleaning Solutions
(Front-End, Back-End & Packaging)
 
 

Existing Products:

  • i-line & KrF Photoresists, TARC and BARC, defect reduction rinse materials

New Products:

  • EUV Photoresists

 

Existing Products:

  • TARC (AZ AQUATAR® VIII), Shrink, BARC (AZ BARLI®), Rinse

New Products:

  • Solid Rinse, EUV Rinse

Existing Products:

  • Edge Bead Removers, Polyimide Developers, MIF & Inorganic Developers

 

 

 

                              

Existing Products:

  • Post Etch Residue Removers, Resist Removers 

New Products:

  • Selective Etchants, Solid Clean 
 

Capabilities

With a long history of removals and cleans solutions, we have established ourselves as a reliable partner in formulated wet cleans. 

  • We are continuous innovators that pushes the boundaries of cleans for new requirements in Advanced Packaging.
  • Our long history and proven success of removals and clean solutions have established us as a reliable partner in formulated wet cleans.
  • We collaborate closely with our customers to deliver tailored solutions faster, more accurately, and more efficiently.

Innovations for Tomorrow

We are committed to advancing our technologies to meet the future demands of semiconductor manufacturing.

Our continuous innovation focuses on sustainable solutions, including green solvent alternatives that are important to our customers. We are now pushing the boundaries of cleans for new requirements in Advanced Packaging, providing high-quality, outstanding compatibility, and effective cleaning to improve yield and performance.

Additionally, we are enhancing precision and efficiency by advancing selective wet etch technologies for Front End of Line (FEOL) applications.

By driving these advancements, we ensure that our technologies remain at the forefront of the industry, delivering the reliability and sustainability our customers expect.

Contact Us

Interested in working together? Get in touch to learn more.