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Advanced Photoresists for the More-than-Moore Industry

The megatrends of mobile applications and smart cars are enabled by leading manufacturers of devices such as RF components, MEMS, Power ICs - just to mention a few. Improvements in performance and integration requirements urge advancements in technology, in chip design, and manufacturing processes. Thereby, lithography plays a key role and new, process specific needs emerge that call for new solutions. This talk will provide insights into our recent developments in photoresist which are specifically designed to meet the needs of the More-than-Moore industry.

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Aqueous Materials for Advanced Lithography

Merck KGaA, Darmstadt, Germany, provides a broad material portfolio enabling advanced photolithography. Rinse material is a unique offering to alleviate capillary force hence mitigate pattern collapse in very fine photoresist pattern through reducing surface tension with novel surfactants. Based on the knowledge and know-hows acquired in the development of rinse materials for ArF dry/immersion lithography processes in the past decades, new material platforms have been developed to extend the technique to meet the ever critical requirements in the era of EUV lithography. We are committed to providing novel solutions to confront the increasing technical challenges in advanced patterning.

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How aerospace technology is driving innovation #TheFutureTransformation by Kai Beckmann

Velcro strips, cordless power drills and microchips are just a few of the many innovations that space exploration has given rise to. As an innovation-driven technology company, Merck KGaA, Darmstadt, Germany, is therefore proud to be partnering with the European Space Agency (ESA) to help advance aerospace technology. And of course other things as well.

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Miniaturization in 3D #TheFutureTransformation by Kai Beckmann

Megatrends such as Big Data, autonomous driving and Artificial Intelligence are pointing the way. An increasingly interconnected world needs more and more powerful microchips. At the same time, microchips have to cost less and consume less power. 3D NAND technology helps achieve these objectives by enabling further miniaturization. Our semiconductor materials are used here, making our company one of the drivers of the digital world.

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