TMPo

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Trimethylphosphate (TMPO) is a liquid phosphorus source used in depositing PSG & BPSG films for semiconductor applications. TMPO is a high purity liquid precursor used in producing high quality dielectric films

Category:
  • Deposition
  • Doping
  • Phosphorus Dopants
Locations:
  • US
  • Korea
  • China
  • Taiwan
  • Japan
  • Europe
Industry:
  • Semiconductors
  • Logic
  • Memory (DRAM, NAND, 3D NAND)

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