Trimethylphosphate (TMPO) is a liquid phosphorus source used in depositing PSG & BPSG films for semiconductor applications. TMPO is a high purity liquid precursor used in producing high quality dielectric films
Category:
- Deposition
- Doping
- Phosphorus Dopants
Locations:
- Global
- US
- Korea
- China
- Taiwan
- Japan
- Europe
Industry:
- Semiconductors
- Logic
- Memory (DRAM, NAND, 3D NAND)