Colloidal Silica for CMP
Precision colloidal silica
Klebosol® precision colloidal silica slurries enable chip manufacturing by precisely planarizing the topography created during film deposition. Klebosol®’s superior formulation maintains its particles in optimum suspension bringing the top layer of the wafer to a critical uniform surface.
Slurries enable CMP processes through both chemical and mechanical interaction with the film being planarized. Klebosol® colloidal silica slurries have been used globally by chip makers since the introduction of CMP in the industry because of the following benefits:
- Consistency and
- Low defectivity
Through computer controlled manufacturing processes and world class quality systems, Klebosol® slurries deliver the performance required by the most advanced chip makers at a competitive cost of ownership.
Our experienced technical teams keep our slurry technology ahead of industry roadmaps, while our global manufacturing sites minimize the risk of supply chain disruption, ensuring uninterrupted chip production.