SiH2Cl2 ─ Dichlorosilane

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SiH2Cl2(DCS); Disilane which is more expensive in Silicon Epi applications and in advanced logics. Other applications include some spacer applications and some Dieletrics.

Category:
  • Metal Hardmasks
Locations:
  • US
  • Europe
Industry:
  • Semiconductors

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Description

SiH2CL2(DCS); Disilane which is more expensive in Silicon Epi applications and in advanced logics. Other applications include some spacer applications and some Dieletrics.

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