Shrink

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Chemical shrink is a post-resist-patterning process that can shrink trench or contact hole patterns. Shrinkage is process controlled during standard bake temperatures.

Category:
  • Shrink
Locations:
  • US
  • Korea
  • China
  • Taiwan
  • Japan
  • Europe
Industry:
  • Semiconductors
Brands:
  • AZ®

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Chemical Shrink

Chemical shrink is a post-resist-patterning process. Combining effects of physical and chemical interactions with photoresists sidewalls, a layer with reduced water solubility is formed. Post simple water rinse to remove excessive materials, the trench or hole pattern is shrunk to a smaller dimension. The volume of shrinkage is process controlled during standard bake temperatures.
 
Target Application
  • Logic, memory and CIS (i-line, KrF, ArF, NTD)
Value Proposition
  • Simple and low cost
  • Process window improvement
  • CDU improvement
  • LWR improvement
Shrink Materials
Shrink Materials

Visual comparison: without shrink materials - with shrink materials

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