Watch the record of our Virtual Panel Discussion here and learn about challenges and opportunities in ALD & ALE as well as market trends and recent acquisitions!
This was our program - thanks for participating!
Monday, June 29
1:00pm - 2:00pm Virtual Panel Discussion: Join our experts and learn about challenges and opportunities in ALD & ALE as well as market trends and recent acquisitions - watch the recording here
5:45pm – 7:00pm Poster Session: Atomic Layer Deposition of Niobium Nitride Thin Film with NbCl5 and NH3 – Dr. Moo-Sung Kim, Versum Materials Korea – Poster Code: AF-MoP20
Download presentation here
Watch the recording here (for AVS Members only)
Tuesday, June 30
1:45pm – 2:00pm Oral Session: Deposition of Inherently Ferroelectric Films by ALD Using ZrD-04 and HfD-04 – Dr. Vijay K. Narasimhan, Intermolecular – Presentation Code: AA-WeA04
Download presentation here
Watch the recording here (for AVS Members only)
5:30pm – 7:00pm Poster Session: Area Selective Atomic Layer Deposition of Molybdenum Films on Nanoscale Metal and Metal Nitride Patterns – Se-Won Lee, Versum Materials Korea, Poster Code: AS-TuP13
Download presentation here
Watch the recording here (for AVS Members only)
5:30pm – 7:00pm Poster Session: Mechanism of Leakage Variation with Aspect Ratio in ALD High-k ZrO2 and HZO Dielectrics - Martin McBriarty, Intermolecular Inc, Poster Code: AA-TuP70
Download presentation here
Watch the recording here (for AVS Members only)
Wednesday, July 1
11:45am – 12:00pm Oral Session: Super-Conformal ALD of Metallic Mo Films by Simultaneous Deposition and Etch – Jean-Sebastien Lehn, EMD Electronics – Presentation Code: LI3-WeM14
Download presentation here
Watch the recording here (for AVS Members only)