ACT® BHP851

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ACT® BHP-851 is fluoride-containing product specially formulated for effective removal of post-etch and ash residue during BEOL Cu integration.

Category:
  • Al IC Cleans
Locations:
  • US
  • Korea
  • China
  • Taiwan
  • Japan
  • Europe
Industry:
  • Semiconductors
Brands:
  • ACT®

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Product info

Description

ACT® BHP-851 is fluoride-containing product specially formulated for effective removal of post-etch and ash residue during BEOL Cu integration. 

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