Specialty Gases
Specialty Gases are high-purity, precisely formulated gases tailored to meet the specific requirements of semiconductor manufacturing.
Recognized Leader in Specialty Gases
We have a leading portfolio, geographic reach, technical support, applications know-how and customer intimacy!
Our precisely formulated Specialty Gases are tailored to meet the specific requirements of various manufacturing processes. Their optimization enhances process efficiency and device performance, significantly contributing to the overall quality and reliability of semiconductor devices.
Our manufacturing facilities are strategically placed to bring a local presence to meet the needs of our global semiconductor partners.
Our Products
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Etching
Etching is removing those parts from the wafers which are not protected, for example by the photoresist, from the patterning step.Browse products -
Cleaning
Strong position in IC cleans & leading player in in Advanced Cleans and Wafer Level Packaging TFRR.Browse products -
Deposition
Gas phase reactants (chemical precursors) used to deposit thin films on substrates by CVD or ALD.Browse products -
Doping
Doping changes the electric behavior of the silicon to create a transistor.Browse products
Our Portfolio consists of over 40 different specialty gases
We manufacture, purify, and distribute over 40 different Specialty Gases globally, meeting the highest quality and safety standards. Our portfolio includes a wide range of gases covering the following platforms: Etching, Cleaning, Deposition, and Doping.
What we offer
We provide one of the largest sets of Specialty Gas products in the industry to deliver customized solutions. Our ultra-high-purity products ensure seamless operations, helping customers worldwide enhance the performance of their products and maintain a competitive edge. Our Specialty Gases enable precise control over chemical reactions, deposition processes, and etching steps, allowing for the creation of intricate semiconductor structures with remarkable accuracy.
Capabilities
We work to improve the efficiency of Etching, Cleaning, Deposition, Doping processes to support the development of next-generation semiconductor technologies.
- Our integrated service model ensures greater operational reliability and positions customers for sustained growth.
- Our proven track record demonstrates consistent product quality, supported by a robust and resilient supply chain.
- We ensure seamless operations by producing high-purity products.
- Focused efforts on advanced synthesis methods along with advanced metrology method development for the most challenging and new Etch Gas molecules.
Partnerships
We work closely with our Delivery Systems and Services (DS&S) business, leveraging gas cabinets with our gases while utilizing MEGASYS®, our trained onsite maintenance team, to provide customers with integrated and ongoing service.
Our global capacity, combined with a local presence, ensures uninterrupted delivery and reliability.
Packaging
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High Pressure Cylinders
High Pressure Gas Cylinders designed for individual use.
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Cylinder Pack
A collection of cylinders securely fastened to a frame, functioning as a single container through a manifold system.
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Y Cylinders
A horizontal cylinder with a 448-liter volume, mounted on a skid for stability.
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Tonners
Large containers with a volume of 900-1000 liters, mounted horizontally on a skid for easy transport.
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ISO MEGC
Multi Elemental Gas Containers where tubes detach from the chassis, allowing for separate handling of ISO and chassis equipment.
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Tube Trailer
A fixed assembly of tubes attached to a trailer chassis, operating as a single integrated unit.
Innovations For Tomorrow
Our commitment to innovation and R&D is taking Specialty Gases to the next level in advanced nodes. Our team has world-class expertise in synthetic chemistry, sustainability, and process innovation. Together, we focus on developing new Specialty Gases that enhance metrology capabilities, resulting in higher purity and improved performance for semiconductor manufacturing.
We are dedicated to creating environmentally friendly alternatives to traditional gases that support the development of next-generation semiconductor technologies.
We collaborate closely with our partners to develop low global warming potential gas solutions, reducing process-related emissions and supporting climate action targets.
Contact Us
Interested in working together? Get in touch to learn more.
