Delivery Systems & Services (DS&S)
Advanced gas and chemical delivery systems ensure the safe, efficient, and reliable supply of high-purity materials that are essential in semiconductor manufacturing.
Enabling science & technology
Our Delivery Systems and Services (DS&S) are designed to store, transport, and deliver gases and chemicals, while maintaining the integrity and purity of the materials throughout the process.
PRODUCTS AND MANUALS
What we offer in gas and chemical delivery systems
We provide safe and reliable integrated process solutions for semiconductor fabs – moving the molecule at all steps. Our team delivers operational excellence and exceptional equipment uptime, allowing us to offer tailored solutions for high purity materials and gases delivery.
Through an intricate network of pipes that connect large storage containers to the subfab, and ultimately to the fab, our advanced gas and chemical delivery systems ensure seamless and safe material flow. By providing precise and consistent delivery, we help uphold high purity standards, which are vital for producing advanced electronic devices. Additionally, our systems maximize uptime and optimize manufacturing processes, allowing semiconductor manufacturers to adapt to evolving demands and drive continuous innovation.
Our Portfolio covers the entire material delivery
Turnkey Projects
Let our team of semiconductor manufacturing experts assist in your project planning and definition, system design, project/construction management and insulation/quality control needs.
Delivery Systems
Safe and reliable: Our Delivery Systems provide high purity gases at the highest level of functionality.
Fab Services
Our MEGASYS and Total Service Solutions let you focus on what you do best by leaving the gas and chemical supply management to us.

Our Equipment portfolio
We participate in defining the industry standard for cost-effective, fab-wide gas and chemical supply and services. We do this with leading positions in…
- specialty chemical delivery
CHEMGUARD® | CHEMKEEPER® - specialty gas delivery
GASKEEPER® - CMP slurry delivery
FLOWMASTER® CMP & POLYFLOW®
PARTS/CARRIER CLEANERS
We provide the entire system for safe material delivery, orchestrating the interplay between cutting-edge materials, best-in-class equipment, and construction services.
Capabilities
We enable breakthroughs that meet the demands of next generation technologies.
- We collaborate closely with customers to provide optimized systems that reduce operating costs, increase yields, and provide safe, sustainable solutions to customers.
- Our tailored and integrated solutions ensure the highest purity and safety standards, with end-to-end fab solutions of materials and equipment.
- We are market innovators who optimize material flows and ensure maximized uptime and output by optimizing the efficiency of semiconductor manufacturing processes.
The position we play to empower fab construction helps to accelerate time-to-market and ensures robust, secure, and efficient production processes.

Safety is our product in DS&S…
We’re trusted in the safe delivery and storage of hazardous materials. We have 30 years of experience with an excellent safety record and full interoperability.
We pair safety with our reliable, resilient & flexible supply.
- Our global footprint and act local mindset ensures that we are where our customers need us most.
- We have an excellent operational and project execution track record with 18 million operating hours and 99.9997% uptime of our equipment
Partnerships
At Delivery Systems and Services, we closely collaborate with teams across our broad portfolio.
We partner with the Thin Films team to integrate cutting-edge container and delivery solutions that maintain the highest and most consistent quality of critical molecules.
We also support the Specialty Gases team through providing gas cabinets and MEGASYS®, our trained onsite maintenance team to provide customers with integrated and ongoing service.
By integrating advanced, automated equipment tools and services, we help to maximize uptime and output by optimizing the efficiency of semiconductor manufacturing processes.
Innovations For Tomorrow
We are market innovators investing in cutting-edge technologies, automated equipment, smart construction and maintenance services that optimize material flows and ensure maximize uptime.
With our Materials Intelligence™ platform, we provide safe material supply of advanced equipment upgrades and end-to-end material excellence. Our operational management of materials guarantees consistent and secure access to chemicals and gases for production processes.
Contact Us
Interested in working together? Get in touch to learn more.
We utilize our global capacity and local presence for safe and resilient customer support