ClF3 ─ Chlorine Trifluoride SC

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Chlorine Trifluoride (ClF3) SC (Semiconductor) is a nearly colorless gas with an irritating odor similar to chlorine or mustard with an extremely low odor threshold.

Category:
  • Edge Bead Remover (EBR)
  • Cleaning Gases
  • Etching
Locations:
  • US
  • Korea
  • China
  • Taiwan
  • Japan
  • Europe
Industry:
  • Sensors (MEMS, Optoelectronics)
  • Industrial
  • Electronic

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Product info

Description

Chlorine Trifluoride (ClF3) SC (Semiconductor) is a nearly colorless gas with an irritating odor similar to chlorine or mustard with an extremely low odor threshold. Our Semiconductor Grade (99.9% purity) is sold in all regions.

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