TDEAT is a titanium source for the deposition of TiN barrier layers or TiO films via CVD and ALD processes.
- Metal Nitrides
- US
- Korea
- China
- Taiwan
- Japan
- Europe
- Semiconductors
- Logic
- Memory (DRAM, NAND, 3D NAND)
TDEAT is a titanium source for the deposition of TiN barrier layers or TiO films via CVD and ALD processes.
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