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SEMI Industry Strategy Symposium (ISS) 2026
This event is organized by SEMI.
Type of Event
Other
Our Participation
Sponsor
Our participation
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Steven Johnston, PhD
VP, Head of Technology Innovation and Enablement
Opening Remarks
12 Jan 2026 - FROM 8:15 TO 8:30 UTC-08:00
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Kevin Gorman
SVP & Head of Patterning Solutions
"Towards a Greener Future: More Sustainable Materials in Semiconductor Manufacturing"
13 Jan 2026 - FROM 11:35 TO 12:05 UTC-08:00
Abstract
Sustainability in chip manufacturing is more critical than ever, with greenhouse gas (GHG) emissions and PFAS alternatives at the forefront of our efforts. In this talk, Kevin Gorman, SVP and Head of Patterning Solutions, will showcase innovative strides in tackling these pressing challenges within the semiconductor industry.
In this session, we will review progress in the development of PFAS-free alternatives across various applications, including fluorinated surfactants, EUV rinses to prevent pattern collapse, photoacid generators (PAGs) for chemically amplified photoresists, and top anti-reflective coatings. Additionally, we will present advancements in alternative etch gases that significantly reduce atmospheric lifetime, offering promising replacements for traditional etch gases and contributing to lower GHG emissions in chip manufacturing.
NEW DIGITAL BROCHURE
Enabling Next-Generation Devices with More Sustainable Etch Chemistry: From Molecular Insight to Scalable Etch Solutions
Download our comprehensive digital brochure and discover how we are advancing semiconductor manufacturing with innovative, environmentally conscious etch solutions.
Fill out the form below to instantly download your free copy.
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Metrology & Inspection
Enabled by optical intelligence Enhancing Manufacturing Yield Performance for Heterogeneous 3D Packaging in AI Devices.
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