Alpha-Terpinene

Print

Alpha-terpinene (ATRP) Precursor is used as a sacrificial organic precursor for the chemical vapor deposition of high quality low constant films.

Category:
  • Low-k Dielectrics
Locations:
  • Global
  • US
  • Korea
  • China
  • Taiwan
  • Japan
  • Europe
Industry:
  • Semiconductors
  • Logic
  • Memory (DRAM, NAND, 3D NAND)

By {{ authorText(item) }}

{{ item.publicationDate }}

Product info

Description

Alpha-terpinene (ATRP) Precursor is used as a sacrificial organic precursor for the chemical vapor deposition of high quality low constant films. When used in the PDEMS® ILD process, it can be used to deposit ultra-low k films with k -2.5 and below.

Find the right material

Identifying the right product can be overwhelming. Our experts can help you find the most suitable solution for your needs.

Contact us