CO2 ─ Carbon Dioxide MEGABIT®

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Carbon Dioxide MEGABIT® (CO2) is a colorless, odorless, nonflammable, liquefied gas that reaches ppb levels when standard carbon dioxide is passed through a purification system.

Category:
  • Deposition
  • Cleaning Gases
  • Metal Hardmasks
Locations:
  • US
  • Korea
  • China
  • Taiwan
  • Japan
  • Europe
Industry:
  • Semiconductors

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Description

Carbon Dioxide MEGABIT® (CO2) is a colorless, odorless, nonflammable, liquefied gas that reaches ppb levels when standard carbon dioxide is passed through a purification system.

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