The CHEMGUARD® Gen III BCD 100 and 200 chemical delivery systems are single-reservoir bulk cabinets designed for fabwide distribution allowing 100% tool uptime. Class I, Division II compliant, the BCD is designed for difficult chemistries in difficult environments. Versum Materials' patented ultrasonic technology lets you completely empty the reservoir to help eliminate expensive chemical waste. Years of experience goes into all of our high purity chemical delivery equipment, ensuring delivery of ultra high purity (UHP) liquids in a safe and cost-effective manner.
The CHEMGUARD® Gen III BCD 100 and 200 chemical delivery cabinet footprint is reduced and each cabinet can be situated directly adjacent to each other. This maximizes the use of available floor space, while reducing exhaust requirements for a lower cost of ownership. Each cabinet is fully automated and includes a microprocessor-based controller with color touchscreen. The controler optimizes container change operations with automated monitoring to ensure removal of all chemical traces from pigtail connections. Standardized, modular design allows for customization, ease of maintenance and future expansion.
The CHEMGUARD® family of high purity chemical delivery equipment is more than just a standalone piece of equipment in your fab. It is designed to interface directly to most OEM process tools and can be supplemented with fabwide distribution systems designed for ultra high purity liquids.
