Our CHEMGUARD® Gen III 100-426 Series Automated Chemical Delivery Systems are dual-reservoir cabinets (DTLR) designed for 100% uptime in order to meet the demanding needs of today's manufacturing fabs. Years of experience goes into all of our high purity chemical delivery equipment, ensuring delivery of ultra high purity (UHP) liquids in a safe and cost-effective manner.
Each cabinet is fully automated and includes a microprocessor-based controller with color touch screen. The controller optimizes container change operations with automated monitoring to ensure removal of chemical from pigtail connections.
CHEMGUARD® has a reduced footprint of 457mm (18 in.) by 533 mm (21 in.), allowing for multiple cabinet placement directly adjacent to each other. This maximizes the use of your floor space within the fab while reducing exhaust requirements for a much lower cost of ownership.
The CHEMGUARD® family of high purity chemical delivery equipment is more than just a standalone piece of equipment in your fab. It is designed to interface directly to most OEM process tools and can be supplemented with fabwide distribution systems designed for ultra high purity liquids.
