CHEMGUARD® CG050 High Flow Bubbler is an automated high flow bubbler designed to support EPI manufacturing with for maximum uptime and to meet the demanding needs of today’s manufacturing fabs. Years of experience goes into all of our high purity chemical delivery equipment, ensuring delivery of ultra high purity (UHP) liquids in a safe and cost-effective manner.
The CG050 bubbler can be filled remotely from an upstream source for 100% uptime. Multiple “plug and play” options exist within the CHEMGUARD® family allowing system design flexibility.
CHEMGUARD® has a reduced footprint of 457mm (18 in.) by 533 mm (21 in.), allowing for multiple cabinet placement adjacent to each other. This maximizes the use of your available floor space within the fab while reducing exhaust requirements for a lower cost of ownership. Each cabinet is fully automated and includes a microprocessor-based controller with color touch screen. The controller optimizes container change operations with automated monitoring to ensure removal of all chemical traces from pigtail connections. Standardized, modular design allows for customization, ease of maintenance and future expansion.
The CHEMGUARD® family of high purity chemical delivery equipment is more than just a standalone piece of equipment in your fab. It is designed to interface directly to most OEM process tools and can be supplemented with fabwide distribution systems designed for ultra high purity liquids.
