CHEMGUARD® and CHEMKEEPER® 200 Solid Source Delivery Systems

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Our CHEMGUARD® and CHEMKEEPER® 200 Solid Source Delivery Systems are automated and dual-bulk solid source delivery systems.

Category:
  • Chemical Delivery Systems
Locations:
  • US
  • Korea
  • China
  • Taiwan
  • Japan
  • Europe
Industry:
  • Logic
  • Memory (DRAM, NAND, 3D NAND)
  • Sensors (MEMS, Optoelectronics)
  • Advanced Packaging
  • Equipment
  • Display
  • Industrial
  • Electronic
Brands:
  • CHEMGUARD®

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Product info

Description

The CHEMGUARD® and CHEMKEEPER® Systems are high purity, solid-source delivery systems designed for high volume manufacturing utilizing solid materials delivered to the process tools in gas form. Decades of experience go into all our high purity chemical delivery systems, ensuring reliable delivery of ultra-high purity (UHP) liquids and gases in a safe and cost-effective manner.

The CHEMGUARD® and CHEMKEEPER® Systems are families of high purity chemical delivery systems are more than just standalone pieces of equipment in your fab. They are designed to interface directly to most OEM process tools.

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