DEZn

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Diethylzinc (DEZn) has been demonstrated to be useful as a II-VI source material and also as a p-type dopant of III-V alloys.

Category:
  • Deposition
  • Doping
  • Metals
  • Other Dopants
Locations:
  • US
  • Korea
  • China
  • Taiwan
  • Japan
  • Europe
Industry:
  • Semiconductors
  • Logic
  • Memory (DRAM, NAND, 3D NAND)

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Product info

Description

Diethylzinc (DEZn) has been demonstrated to be useful as a II-VI source material and also as a p-type dopant of III-V alloys. Its decomposition characteristics closely match the optimum group VI source materials leading to maximum precursor compatibility.

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