EUV Rinse

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A product applied to EUV process brought through our collaboration with TEL. Improvements have been observed in resist pattern collapse, process window, and resolution by replacing DI water with EUV rinse.

Category:
  • EUV Rinse
Locations:
  • Global
  • US
  • Korea
  • China
  • Taiwan
  • Japan
  • Europe
Industry:
  • Semiconductors
Brands:
  • AZ®

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Product info

Description

A product applied to EUV process brought through our collaboration with TEL. Improvements have been observed in resist pattern collapse, process window, and resolution by replacing DI water with EUV rinse.

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