FLOWMASTER® CMP Chemical Delivery System

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The FLOWMASTER® CMP Chemical Delivery System supplies precise blending and delivery of post-CMP rinse chemical.

Category:
  • CMP Slurry Delivery Systems
Locations:
  • Global
  • US
  • Korea
  • China
  • Taiwan
  • Japan
  • Europe
Industry:
  • Logic
  • Memory (DRAM, NAND, 3D NAND)
  • Sensors (MEMS, Optoelectronics)
  • Advanced Packaging
  • Equipment
Brands:
  • FLOWMASTER®

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Product info

Description

The FLOWMASTER® CMP Chemical Delivery System supplies precise blending and delivery of post-CMP rinse chemical. When integrated with the slurry delivery system the entire tool suite delivers a complete CMP chemical solution.

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