GASGUARD® Acetylene Delivery System

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GASGUARD® Acetylene Delivery System was designed for amorphous carbon hard mask (CHM) applications.

Category:
  • Gases Delivery Systems
Locations:
  • US
  • Europe
Industry:
  • Logic
  • Memory (DRAM, NAND, 3D NAND)
  • Sensors (MEMS, Optoelectronics)
  • Advanced Packaging
  • Equipment
  • Display
  • Industrial
  • Electronic
  • Spray Foam Insulation
  • Conductive Adhesives
Brands:
  • GASGUARD®

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Product info

Description

GASGUARD® Acetylene Delivery System was designed for amorphous carbon hard mask (CHM) applications. For semiconductor device manufacturers in the DRAM and Flash Memory markets, the system will reduce operating costs, increase cylinder utilization, and improve both film quality and yields.

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