GASGUARD® BulkGUARD™ Bulk Gases System

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Our GASGUARD® BulkGUARD™ Bulk Gases System delivers maximum safety and reliability (100% uptime).

Category:
  • Gases Delivery Systems
Locations:
  • US
  • Europe
Industry:
  • Logic
  • Memory (DRAM, NAND, 3D NAND)
  • Sensors (MEMS, Optoelectronics)
  • Advanced Packaging
  • Equipment
  • Display
  • Industrial
  • Electronic
  • Spray Foam Insulation
  • Conductive Adhesives
Brands:
  • GASGUARD®

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Product info

Description

Our GASGUARD® BulkGUARD™ Bulk Gases System delivers maximum safety and reliability (100% uptime). In addition, it lowers cost of ownership, is compatible with many gases and flexible sources, offers flow rate scalability up to 1000 slpm and other advantages. BulkGUARD™ delivers state-of-the-art fabwide heat sourcing and control of electronic specialty gases requiring heating before delivery to the tool.

We introduced our BSGS (Bulk Specialty Gas Systems) fabwide delivery option to the electronics industry in the 1980s and remain the market leader in manufacturing and supplying it globally.

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