GASGUARD® eV Temperature Control System

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The GASGUARD® eV temperature control system delivers state of the-art fab-wide heat sourcing and control of electronic specialty gases requiring heating before delivery to the tool.

Category:
  • Gases Delivery Systems
Locations:
  • US
  • Europe
Industry:
  • Logic
  • Memory (DRAM, NAND, 3D NAND)
  • Sensors (MEMS, Optoelectronics)
  • Advanced Packaging
  • Equipment
  • Display
  • Industrial
  • Electronic
  • Spray Foam Insulation
  • Conductive Adhesives
Brands:
  • GASGUARD®

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Product info

Description

The GASGUARD® eV temperature control system delivers state of the-art fab-wide heat sourcing and control of electronic specialty gases requiring heating before delivery to the tool. This latest addition to our premier line of GASGUARD® delivery systems and equipment includes an ECC heater/controller, the GASGUARD® AP11 controller, and a gas cabinet with two blankets and two heat traces to accommodate two A or B size cylinders, plus others are also available.

 

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