GASGUARD® eV Temperature Control System

Print

The GASGUARD® eV temperature control system delivers state of the-art fab-wide heat sourcing and control of electronic specialty gases requiring heating before delivery to the tool.

Category:
  • Gases Delivery Systems
Locations:
  • US
  • Europe
Industry:
  • Logic
  • Memory (DRAM, NAND, 3D NAND)
  • Sensors (MEMS, Optoelectronics)
  • Advanced Packaging
  • Equipment
  • Display
  • Industrial
  • Electronic
  • Spray Foam Insulation
  • Conductive Adhesives
Brands:
  • GASGUARD®

By {{ authorText(item) }}

{{ item.publicationDate }}

Product info

Description

The GASGUARD® eV temperature control system delivers state of the-art fab-wide heat sourcing and control of electronic specialty gases requiring heating before delivery to the tool. This latest addition to our premier line of GASGUARD® delivery systems and equipment includes an ECC heater/controller, the GASGUARD® AP11 controller, and a gas cabinet with two blankets and two heat traces to accommodate two A or B size cylinders, plus others are also available.

 

Find the right material

Identifying the right product can be overwhelming. Our experts can help you find the most suitable solution for your needs.