GeH4 ─ Germane

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Germane (GeH4) is a gas used for depositing the SiGe layer, which provides improved electric properties.

Category:
  • Deposition
  • Semiconductor Materials
Locations:
  • US
  • Korea
  • China
  • Taiwan
  • Japan
  • Europe
Industry:
  • Logic
  • Memory (DRAM, NAND, 3D NAND)

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Description

Germane (GeH4) is a gas used for depositing the SiGe layer, which provides improved electric properties.

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