Hexafluorobutadine (Hexafluoro-1,3-butadiene) C4F6 is used for dielectric etch applications. Hexafluoro-1,3-butadiene is a toxic, colorless, odorless, flammable liquefied compressed gas.
- Etching
- Global
- US
- Korea
- China
- Taiwan
- Japan
- Europe
- Logic
- Memory (DRAM, NAND, 3D NAND)