Hexafluoroacetylacetone(HFRC) is a liquid source material for dry etch Cu and cleaning metals.
- Deposition
- Global
- US
- Korea
- China
- Taiwan
- Japan
- Europe
- Semiconductors
- Logic
- Memory (DRAM, NAND, 3D NAND)
Hexafluoroacetylacetone(HFRC) is a liquid source material for dry etch Cu and cleaning metals.
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