HCl ─ Hydrogen Chloride MEGA

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Hydrogen Chloride (HCl) is used in various surface cleaning processes and to clean LPCVD chambers.

Category:
  • Etching
  • Cleaning Gases
Locations:
  • US
  • Korea
  • China
  • Taiwan
  • Japan
  • Europe
Industry:
  • Logic
  • Memory (DRAM, NAND, 3D NAND)

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Description

Hydrogen Chloride (HCl) is used in various surface cleaning processes and to clean LPCVD chambers.

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