ION-X® BF3 ─ Boron Trifluoride ION-X® Dopant Gas Storage and Delivery System

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Isotopically Enriched BF3 (Boron Trifluoride) ION-X® Dopant Gas Storage and Delivery System sub atmospheric dopant gas storage and delivery system solutions for our worldwide customers.

Category:
  • Sub-Atmospheric Gas Storage and Delivery
  • Boron Dopants
Locations:
  • US
  • Korea
  • China
  • Taiwan
  • Japan
  • Europe
Industry:
  • Semiconductors
Brands:
  • ION-X®

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Product info

Description

Isotopically Enriched BF3 (Boron Trifluoride) ION-X® Dopant Gas Storage and Delivery System sub atmospheric dopant gas storage and delivery system solutions for our worldwide customers. ION-X® is used for the safe storage and delivery of sub-atmospheric dopant gases such as arsine, phosphine and boron trifluoride. With its Metal-Organic Framework (MOF), ION-X® can selectively adsorb, store and safely deliver ultra-high purity gases at sub-atmospheric pressures.

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