KrF Thick film resists

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KrF thick film resists perform high sensitivity and high resolution with excellent pattern profile. Good etch resistance and ion implantation tolerance enable several applications for IC device manufacturers.

Category:
  • KrF Thick-film Resists
Locations:
  • US
  • Korea
  • China
  • Taiwan
  • Japan
  • Europe
Industry:
  • Semiconductors
Brands:
  • AZ®

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THICK FILM RESISTS FOR BACK-END PROCESSES

Thick Film Resists (TFR) for back-end packaging conductive circuitry is typically made by a bottom-up metal plating process inside the same layer of a patterned TFR. They enable the manufacturing of TSV, RDL & bumping in advanced packaging.

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