Phosphine (PH3) ION X dopant gas storage and delivery system available for our worldwide customers.
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- Ion-x
Phosphine (PH3) ION X dopant gas storage and delivery system available for our worldwide customers.
Phosphine (PH3) ION X dopant gas storage and delivery system available for our worldwide customers. ION-X is used for the safe storage and delivery of sub-atmospheric dopant gases such as arsine, phosphine and boron trifluoride. With its Metal-Organic Framework (MOF), ION-X can selectively adsorb, store and safely deliver ultra-high purity gases at sub-atmospheric pressures.
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