PH3 ─ Phosphine MEGABIT® II

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We offer Phosphine (PH3) in two grades for use in semiconductor and photovoltaic process applications: MOCVD Phosphine (99.9998%) and MEGABIT® II Phosphine (99.9999%).

Category:
  • Phosphorus Dopants
Locations:
  • US
  • Korea
  • China
  • Taiwan
  • Japan
  • Europe
Industry:
  • Semiconductors

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Product info

Description

We offer Phosphine (PH3) in two grades for use in semiconductor and photovoltaic process applications: MOCVD Phosphine (99.9998%) is our standard high-purity grade and MEGABIT® II Phosphine (99.9999%) is our standard purity grade. Phosphine is a highly-toxic, flammable, colorless, liquefied compressed gas.

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