HCI – SEMI Hydrogen Chloride

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Hydrogen Chloride (HCl) is used in various surface cleaning processes and to clean LPCVD chambers.

Category:
  • Etching
  • Cleaning Gases
Locations:
  • US
Industry:
  • Logic
  • Memory (DRAM, NAND, 3D NAND)

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Description

Hydrogen Chloride (HCl) is used in various surface cleaning processes and to clean LPCVD chambers.

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