Silicon Tetrafluoride (SiF4) is a source of fluorine for processes requiring controlled concentrations of fluorine present to form low-k films.
Category:
- Metal Hardmasks
- Etching
- Low-k Dielectrics
Locations:
- US
- Korea
- China
- Taiwan
- Japan
- Europe
Industry:
- Semiconductors
- Logic
- Memory (DRAM, NAND, 3D NAND)