TARC

Print

TARC is a cost-effective solution for reflectivity control in applications from i-line, KrF and ArF lithography and improves on resist performance by providing a capping layer to prevent contaminations.

Category:
  • TARC
Locations:
  • US
  • Korea
  • China
  • Taiwan
  • Japan
  • Europe
Industry:
  • Semiconductors
Brands:
  • AZ®

By {{ authorText(item) }}

{{ item.publicationDate }}

TARCs

TARCs (= Top Antireflective Coatings) are the industry standards as cost-effective solutions for reflectivity control in applications from i-line, KrF and ArF lithography. The straightforward process also adds values for improvement on resist performance by providing a capping layer to prevent contaminations. 
 
Target Application
  • Logic implant layers and CIS (i-line, KrF and ArF)
Value Proposition
  • Reflectivity control
  • Vertical profile
  • Defect reduction
TARC TARC

1/3

TARC

Visual comparison: without TARC - with TARC
TARC TARC

2/3

TARC - Optical theory (simple vertical incidence case)

Optimal TARC film thickness calculated from the above shows good agreement with actual results, but If more strict TARC film thickness is required for your application, it is recommended to calculate optimal TARC FT by simulation software.
Lithography And PEM Material Roadmap Lithography And PEM Material Roadmap

3/3

Lithography and PEM Materials

Industry roadmap, landscape and trends
z

Summary of TARC vs. BARC

Items

TARC

BARC

Coating
  • Fine tune necessary on PR, especially on topography
  • Coating on any substrate
  • X-link bake@>180C
  • Outgassing: Only EB52C & EB18B

Install concerns

Micro bubble

Friendly

Etch

No need

Plasma etch

Stripping

No need

O2 ashing, strong acid

PR swing reduction

1/3

1/10, no notching

Standing wave

No improvement

Elimination

Resist profiles

Acidity control for CA PR round/T-top

Film density control for CA PR footing/undercut 

Side effect

Resist defect reduction

 

Find the right material

Identifying the right product can be overwhelming. Our experts can help you find the most suitable solution for your needs.

Contact us