TARC

TARC is a cost-effective solution for reflectivity control in applications from i-line, KrF and ArF lithography and improves on resist performance by providing a capping layer to prevent contaminations.

Category:

TARC

Locations:

Global
US
Korea
China
Taiwan
Japan
Europe

Industry:

Semiconductors

Brands:

AZ®

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TARCs

TARCs (= Top Antireflective Coatings) are the industry standards as cost-effective solutions for reflectivity control in applications from i-line, KrF and ArF lithography. The straightforward process also adds values for improvement on resist performance by providing a capping layer to prevent contaminations.

Target Application

Logic implant layers and CIS (i-line, KrF and ArF)

Value Proposition

Reflectivity control
Vertical profile
Defect reduction

Summary of TARC vs. BARC

Items	TARC	BARC
Coating	Fine tune necessary on PR, especially on topography	Coating on any substrate X-link bake@>180C Outgassing: Only EB52C & EB18B
Install concerns	Micro bubble	Friendly
Etch	No need	Plasma etch
Stripping	No need	O2 ashing, strong acid
PR swing reduction	1/3	1/10, no notching
Standing wave	No improvement	Elimination
Resist profiles	Acidity control for CA PR round/T-top	Film density control for CA PR footing/undercut
Side effect	Resist defect reduction

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TARC

TARCs

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TARC

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TARC - Optical theory (simple vertical incidence case)

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Lithography and PEM Materials

Summary of TARC vs. BARC

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