TBTDET is a liquid precursor for CVD or ALD tantalum oxide and tantalum nitride thin films depositions.
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- Metal Oxides
- Metal Nitrides
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- US
- Korea
- China
- Taiwan
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- Semiconductors
- Logic
- Memory (DRAM, NAND, 3D NAND)
TBTDET is a liquid precursor for CVD or ALD tantalum oxide and tantalum nitride thin films depositions.
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