Tetrakis(ethylmethylamido)hafnium(TEMAHf) is a liquid source material for ALD of the high-k gate rielectric such as HfO2 and HfxNy.
- Metal Nitrides
- Metal Hardmasks
- Deposition - Metal Hardmask
- Global
- US
- Korea
- China
- Taiwan
- Japan
- Europe
- Semiconductors
- Logic
- Memory (DRAM, NAND, 3D NAND)