TEMAHf

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Tetrakis(ethylmethylamido)hafnium(TEMAHf) is a liquid source material for ALD of the high-k gate rielectric such as HfO2 and HfxNy.

Category:
  • Metal Nitrides
  • Metal Hardmasks
  • Deposition - Metal Hardmask
Locations:
  • US
  • Korea
  • China
  • Taiwan
  • Japan
  • Europe
Industry:
  • Semiconductors
  • Logic
  • Memory (DRAM, NAND, 3D NAND)

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