Trimethylborate (TMB) is used as a liquid boron dopant in the Thin Film Deposition of Borosilicate (BSG) and Borophosphosilicate (BPSG) glasses to reduce the reflow temperatures of the deposited glass.
Category:
- Deposition
- Doping
- Boron Dopants
- Metals
Locations:
- US
- Korea
- China
- Taiwan
- Japan
- Europe
Industry:
- Semiconductors
- Logic
- Memory (DRAM, NAND, 3D NAND)