TMG

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Trimethylgallium (TMGa) is the most widely used source for GaAs MOVPE.

Category:
  • Metals
  • Other Dopants
Locations:
  • US
  • Korea
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Industry:
  • Semiconductors
  • Logic
  • Memory (DRAM, NAND, 3D NAND)

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Product info

Description

Trimethylgallium (TMGa) is the most widely used source for GaAs MOVPE. A room temperature (20°C) V.P. of 182 torr makes it suitable for both atmospheric and low pressure applications. Our high purity TMG is also suitable for sensitive GaN processes due to low Si impurities.

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