Trans-LC® Chlorine Source for Silicon Oxidation

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Trans-LC® (Trans 1,2-Dichloroethylene) is an ozone-safe liquid chlorine source for use in silicon oxidation and tube cleaning.

Category:
  • Deposition
  • Surface Prep & Cleaning (SP&C)
Locations:
  • US
  • Korea
  • China
  • Taiwan
  • Japan
  • Europe
Industry:
  • Semiconductors
  • Logic
  • Memory (DRAM, NAND, 3D NAND)

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Product info

Description

Trans-LC® (Trans 1,2-Dichloroethylene) is an ozone-safe liquid chlorine source for use in silicon oxidation and tube cleaning. It features a low toxic hazard rating and is not restricted as an ozone depleting chemical. Trans-LC provides consistent process results and is superior in performance to corrosive HCl. The use of Trans-LC is preferred over any known chlorine sources in the low-temperature range below 800°C. We sell both EXTREMA® and nCtrl® grades of Trans-LC.

Benefits of Trans-LC

  • An ozone friendly source that is not regulated as an ozone depleting chemical
  • Replaces TCA with minor modifications
  • Usage results in improved minority carrier life times and highly uniform gate oxides
  • Higher purity alternative than HCl
  • Non-corrosive, will not contribute to contamination

Typical physical properties

Trans-LC  
FormulaC2H2Cl2
Molecular Weight96.94
Flash Point< 2°C
Boiling Point48°C @ 760 mmHg
Density1.257 (water = 1)
Vapor Density3.67 g/l (air=1)
TLV200 ppm
Freezing Point-50°C

Applications

Trans –LC is suitable for use in:

  • Thermal oxidation of silicon at ≤800 °C
  • Furnace tube cleaning in CMOS and memory fabs
  • Advanced node logic & memory production (<10 nm)
  • 3D packaging and TSV (Through-Silicon Via) technologies

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