Trans-LC® (Trans 1,2-Dichloroethylene) is an ozone-safe liquid chlorine source for use in silicon oxidation and tube cleaning.
- Deposition
- Surface Prep & Cleaning (SP&C)
- Global
- US
- Korea
- China
- Taiwan
- Japan
- Europe
- Semiconductors
- Logic
- Memory (DRAM, NAND, 3D NAND)