Trans-LC

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Trans-LC® (Trans 1,2-Dichloroethylene) is an ozone-safe liquid chlorine source for use in silicon oxidation and tube cleaning.

Category:
  • Deposition
  • Surface Prep & Cleaning (SP&C)
Locations:
  • US
  • Korea
  • China
  • Taiwan
  • Japan
  • Europe
Industry:
  • Semiconductors
  • Logic
  • Memory (DRAM, NAND, 3D NAND)

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Product info

Description

Trans-LC® (Trans 1,2-Dichloroethylene) is an ozone-safe liquid chlorine source for use in silicon oxidation and tube cleaning. It features a low toxic hazard rating and is not restricted as an ozone depleting chemical. Trans-LC provides consistent process results and is superior in performance to corrosive HCl. The use of Trans-LC is preferred over any known chlorine sources in the low-temperature range below 800°C. We sell both EXTREMA® and nCtrl® grades of Trans-LC.

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