WCl5

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WCl5 is used for CVD or ALD fluorine-free Tungsten liner and fill depositions for metal gate contact in logic devices.

Category:
  • High-k
  • Metal Oxides
Locations:
  • US
  • Korea
  • China
  • Taiwan
  • Japan
  • Europe
Industry:
  • Semiconductors
  • Logic
  • Memory (DRAM, NAND, 3D NAND)

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