12 Jul 2026
SEMI Strategic Materials Conference (SMC) 2026
This event is organized by SEMI association.
Select your Market
-
{{ userContent.title }}
{{ userContent.lookingForMoreLabel }}
SEMICON Japan & SEMI Strategic Materials Conference (SMC) 2025
These events are organized by SEMI.
Type of Event
Other
SEMICON Japan 2025
Stronger Together
SEMICON Japan is the premier event that brings together the semiconductor manufacturing supply chain for the latest insights, trends and innovations as the industry powers digital transformation.
SEMI Strategic Materials Conference
-
Kazuma Yamamoto
R&D Manager
“Water-base Rinse Materials for EUV-CAR Lithography”
16 Dec 2025 - FROM 15:30 TO 16:00 UTC+09:00
Abstract
EUV-CAR lithography is widely used for the high-volume manufacturing (HVM) of advanced semiconductor devices. Water-based rinse treatment following TMAH development is an essential process for achieving yield improvement. In this study, the role of rinse materials and the required performance in EUV-CAR, and performance evaluation methods will be presented.
SEMICON Japan
-
Surésh Rajaraman, PhD
EVP and Head of Thin Film Business Unit
PFAS and Sustainability “Towards a Greener Future: More Sustainable Materials in Semiconductor Manufacturing”
18 Dec 2025 - FROM 11:45 TO 12:00 UTC+09:00
Abstract
GHG emissions and PFAS alternatives are pivotal areas for sustainability efforts in chip manufacturing. In this presentation, Dr. Surésh Rajaraman, EVP and Head of Thin Films Business and interim Head of Formulations and Commercial Leadership Board, will highlight our advancements in identifying alternatives to help solving GHG and PFAS related challenges of the semiconductor industry.
We will provide updates on our efforts to identify suitable candidates for PFAS replacement in various applications, such as fluorinated surfactants, EUV anti-collapse rinses, PAGs for chemically amplified photoresists across different wavelengths, and top anti-reflective coatings. And we will share insights into the development of alternative etch gases with significantly reduced atmospheric lifetime, which have the potential to replace traditional etch gases and help reducing GHG emissions in chip manufacturing. Additionally, we will discuss our investment in the Advanced Materials Development Centre in Shizuoka, Japan, where it will explore alternative materials and technological solutions that support more sustainable manufacturing practices.
Need support finding the right materials solutions?
Our team of specialists can help!
- Get expert advice on-site. Click here to connect at the event!
- Contact us if you have a technical question, if you need a quote or sample, or if you are looking for a tech document.
Investing in a Sustainable Semiconductor Future
Materials Matter
Semiconductor companies large and small talk about achieving climate neutrality by 2030. That sounds like a great goal. But merely achieving that goal won’t solve the emissions problem. How we get there matters.
Related News
View All News-
Press Releases
2026 Future Insight Prize Goes to Spear’s Vasilis Ntziachristos
The € 300,000 research grant award recognizes Ntziachristos’ pioneering work in enabling non-invasive and continuous monitoring of human biology.
2026/06/23
-
Press Releases
Merck KGaA, Darmstadt, Germany, Opens €20 million Metrology and Inspection ...
New site expands capacity for M&I tools fivefold, supporting chip manufacturers in advanced packaging and heterogeneous integration for AI chips.
2026/05/05
-
Information
AGM: Beckmann to be appointed as CEO May 1
Belén Garijo passed symbolically the baton to Kai Beckmann. Annual General Meeting approved dividend of € 2.20.
2026/04/24
Upcoming Events
View All Events21 Jul 2026
Semiconductor Webinar Series
This webinar is co-hosted by SEMI Korea and the Electronics business of Merck KGaA, Darmstadt, Germany.