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Advancing the Dry Etching Process
Join us to discover how to advance your dry etching process by building a robust supply chain and driving material innovation. This webinar is co-hosted by SEMI.
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Overcoming EUV Lithography Barriers Through DSA Technology
The complex molecular assembly of DSA will be explained, and we will walk through the steps of how it can be integrated into an advanced patterning process. This webinar is co-hosted by SEMI.
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Scaling Digital Solutions
Join us to discover how data and strengthening digital technologies is one of the top priorities for semiconductor businesses to address higher yields, zero defects, and shrinking dimensions.
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Advanced Materials
Learn how to best introduce new materials in chip fabrication workflows as the demand for better performance, functionality, and reliability grows for applications such as 5G, AI/VR, AR & edge computing.
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Innovations in ALD and ALE
Sergei Ivanov, Senior R&D Manager, Organometallics, Thin Films Business & Martin McBriarty, Senior Scientist at the Electronics business of Merck KGaA, Darmstadt, Germany
October 18, 2023
Agenda
October 18, 2023 | 4:00 pm - 5:00 pm CET
4:00 pm CET - Welcome remarks by Laith Altimime | President, SEMI Europe
4:05 pm CET - Revolutionizing Materials and Products: Innovations in Atomic Layer Deposition (ALD) and Atomic Layer Etch (ALE) by Sergei Ivanov & Martin McBriarty | Senior R&D Manager, Organometallics, Thin Films Business & Senior Scientist
4:45pm CET - Q&A Moderated by Laith Altimime and Conclusions by all speakeres | President, SEMI Europe & Executive Vice President
Speaker
Sergei Ivanov | Senior R&D Manager, Organometallics, Thin Films Business
CV: Sergei Ivanov is the Senior R&D Manager in the Organometallics division of Thin Films Business, where he leads a research program developing novel precursors for deposition of metal, metal nitride and metal oxide films. He is based at the R&D and manufacturing site in Hometown, Pennsylvania, USA. Sergei received a PhD in Inorganic Chemistry from Kurnakov Institute of Russian Academy of Sciences and a B.S. in Chemical Engineering from Mendeleev University of Chemical Technology.
Martin McBriarty | Senior Scientist
CV: Martin McBriarty (he/him) leads the development of atomic layer etch and other vapor-phase etch methods at the Intermolecular site in San Jose, California, USA. He earned his B.S. in Materials Science & Engineering at the University of Florida in 2008 and his Ph.D. in the same field at Northwestern University in 2014, during which he also studied at the Fritz Haber Institute as a Fulbright scholar. Martin joined Intermolecular in 2018 after completing postdoctoral research at Pacific Northwest National Laboratory.
Semiconductor Materials
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