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Semiconductor Webinar Series

This webinar is co-hosted by SEMI Korea and the Electronics business of Merck KGaA, Darmstadt, Germany.

Type of Event

Virtual Event

Abstract

A Game Changer in Deposition Processes: Next-Generation Process Material Molybdenum and Advanced Delivery Systems

With the rapid advancement of artificial intelligence and high-performance computing, molybdenum is emerging as a game-changing metal for next-generation semiconductor processes, surpassing conventional materials such as copper and tungsten. For nanometer-scale ultra-thin film deposition processes, molybdenum dichloride dioxide, a criticalsolid source of precursor, is essential. 

Molybdenum offers excellent conductivity and low resistivity in highly integrated structures, helping maximize chip performance while reducing energy consumption. However, because molybdenum products have a relatively high melting point of 175°C and are sensitive to moisture, advanced delivery technology is essential for stable handling and process operation.

In this webinar, we will discuss the strengths and material insights of molybdenum products, as well as our integrated solution that combines molybdenum with the advanced delivery system CHEMKEEPER for optimized process support.

Register now to experience the forefront of change and innovation! This webinar will be available in both English and Korean.

Speaker

  1. Dr. Benjamin Garrett

    Dr. Benjamin Garrett

    Head of New Product Introduction, SG & DSS

    A Game Changer in Deposition Processes: Next-Generation Process Material Molybdenum and Advanced Delivery Systems and Q&A

    22 Jul 2026 - FROM 15:00 TO 16:00 UTC+09:00

Biography

Dr. Benjamin Garrett is the Head of New Product Introduction within the Innovation team for Specialty Gases and Delivery Systems and Services. Ben leads the New Product Introduction process for both businesses to maximize the return on R&D investments and drive new products to a successful launch. Ben has over a decade of experience working on molybdenum precursors and supporting New Product Development teams for thin film deposition product lines. He holds a PhD and BS in Chemistry from The Ohio State University and University of Illinois Urbana- Champaign, respectively.

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