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Molybdenum Magic

Precision Chemistry Meets Advanced Delivery Systems - Our Molybdenum precursor combined with CHEMGUARD®/CHEMKEEPER® SOLID elevate your innovation with efficiency.

How we do it?

Molybdenum Dichloride Dioxide (MoO2Cl2) is a specialized precursor for Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD) in fluorine-free metal applications (Logic, DRAM, 3D NAND).

Our CHEMGUARD®/CHEMKEEPER® SOLID delivery systems optimize MoO2Cl2 handling and material utilization via high-density container fill. Maintaining constant temperature during transport is crucial for system reliability and uninterrupted production.

Check out the video below to learn more.

　

　

Contact Us

Get support from our Thin Films team on our comprehensive offerings about our Molybdenum precursor materials and CHEMGUARD® SOLID solutions.

what sets us apart: our unique strengths

  

  • Chemistry

    With our high-quality and purity precursor production in multiple locations, our local-to-local approach enables us to serve customers in the US and Asia closely.

  • Delivery System

    With major OEM partner qualifications, our advanced delivery systems CHEMGUARD®/CHEMKEEPER® SOLID enable high volume manufacturing and lowest total cost of ownership.

  • Process

    We offer reliable process control on temperature and pressure, allowing consistent supply and maximum utilization.

  • Services

    Our team of experts in materials and equipment are located around the world to support you.

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Product Portfolio Molybdenum Dichloride Dioxide Chemguard Vapor 200

Product

Molybdenum Dichloride Dioxide(MoO2Cl2) is a solid source material and it is for fluorine free metal application for logic, DRAM and 3DNAND devices.

Product

Our CHEMGUARD® and CHEMKEEPER® 200 Solid Source Delivery Systems are automated and dual-bulk solid source delivery systems.

Why Choose Molybdenum with Us? INSIGHTS FROM OUR EXPERT

  • Ed Shober Ed Shober

    Ed Shober | Chief Operating Officer

    “With rigorous quality control and responsive technical support, we optimize process windows and accelerate time to market. Our custom molybdenum solution delivers higher flow rates, tighter pressure control, and exceptional material utilization. Together, we partner to enhance your operational efficiency and drive success.”

  • Untitled (611 x 407 px) - 1 Untitled (611 x 407 px) - 1

    Sergei Ivanov | Director Business Technology Metallics

    "Switching to our molybdenum dichloride (MoO₂Cl₂) offers your semiconductor operations a powerful boost in tool productivity and precursor utilization, while also aligning with sustainability goals."

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