Carbon Tetrafluoride VLSI (CF4) is used for chamber cleaning in semiconductor applications, in MEMS etching applications, and in Flat Panel Display etching applications.
Category:
- Doping
- Etching
Locations:
- US
- Korea
- China
- Taiwan
- Japan
- Europe
Industry:
- Logic
- Memory (DRAM, NAND, 3D NAND)
- Sensors (MEMS, Optoelectronics)
- Display