International Conference on Planarization Technology (ICPT)

ICPT is jointly hosted by the CMP User's Group of the Northern California Chapter of the American Vacuum Society & Clarkson University's Center for Advanced Materials Processing (C.A.M.P.).

Type of Event

Other

Our Participation

Sponsor

27 Sep 2022 - 29 Sep 2022

Hybrid – The Benson Hotel, Portland, OR

Join us

Join our Executive Director and Head of Business, Planarization Saifi Usmani, along with academic researchers, industrial practitioners, and engineers from around the world to exchange information on state-of-the-art research in CMP technology. ICPT 2022 promotes the exchange of opportunities, ideas, friendly relationships, and research collaboration.

 

Our participation

  1. Saifi Usmani

    ED and Head of Business, Planarization

     

  2. Navnidhi Upadhyay

    Research Scientist

    28 Sep 2022 - 16:45

    Poster Presentation (P37): “A Machine Learning-Based Approach for Quality Control of Chemical Mechanical Planarization Process”

Co-paper Authors

 “Characterizing the Tribological, Thermal & Kinetic Attributes of Non-Selective Tungsten “BUFF” CMP Slurries in Conjunction with Different Pads” by

  • Yasa Sampurno
  • Matthias Stender
  • Agnes Derecskei
  • Sana Ma
  • Nitin Chopra
  • Robert Vacassy
  • Yasa Sampurno
  • Ara Philipossian (Araca Incorporated)