SPIE Advanced Lithography + Patterning 2023

Meet leading researchers who are solving challenges in optical and EUV lithography, patterning technologies, metrology, and process integration for semiconductor manufacturing and adjacent applications.

Type of Event

Other

Our Participation

Sponsor

26 Feb 2023 - 02 Mar 2023

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Convention Center, San Jose, CA

Meet us

  • Plenary Session: 16:00-17:00 PST | Grand Ballroom, 220A 
  • Poster Reception with refreshments & networking opportunities: 17:30-19:30 PST | Convention Center Hall 2, Room 211B, and Grand Ballroom 220C 
  • Welcome Reception27 February 2023 • 18:00 PM -19:00 PST | Convention Center, Main Entrance Plaza - Join us to enjoy drinks and hors-d'oeuvres on the first night of the conference. All attendees are welcome. Please remember to wear your registration badge. Dress is casual.

Courses

  1. Ralph Dammel

    Research Fellow

    Course at Event: "Introduction to Microlithography: Theory, Materials, and Processing"

    26 Feb 2023 - FROM 8:30 TO 17:30 UTC-08:00

  2. Ralph Dammel

    Research Fellow

    Course: "Practical Photoresist Processing"

    02 Mar 2023 - FROM 8:30 TO 12:30 UTC-08:00

Technical Presentations

  1. Kun Si

    Senior Research Scientist

    Conference Presentation: "Negative-tone Resist for EUV Lithography"

    01 Mar 2023 - FROM 13:50 TO 14:10 UTC-08:00

  2. Boaz Alperson

     

    Conference Presentation: "EUV Lithography Line-space Pattern Rectification Using Block Copolymer Directed Self-assembly: A Roughness and Defectivity Study"

    01 Mar 2023 - FROM 15:10 TO 15:30 UTC-08:00

  3. Walter Liu

    Senior Research Specialist

    Conference Presentation: "Positive Tone i-line Photoresist with Controlled Undercut Profile for Advanced Packaging"

    01 Mar 2023 - FROM 17:30 TO 19:00 UTC-08:00

  4. Ashley Moore

    Research Scientist

    Conference Presentation: "Profile Control in Conductor Metal Wet Etch with Advanced Photoresists"

    01 Mar 2023 - FROM 17:30 TO 19:00 UTC-08:00

Student Event

  1. Ivy Lewis & Ralph Dammel

    Talent Acquisition Partner

    Social and Networking Event: Mentor & Student Luncheon

    27 Feb 2023 - FROM 12:30 TO 13:30 UTC-08:00

Interesting in our webinar?

Watch our on-demand webinar to discover how Directed Self-Assembly (DSA) technology and its material development can help overcome the scaling barriers of EUV lithography. By clicking this button, you're leaving our website to SEMI.

Discover Future talk

Can you imagine microchips that can assemble themselves at the molecular level?! Tune in as our experts, Dr. Baskaran Durairaj and Dr. Jerome Wandell, explore the many benefits of Directed Self-Assembly (DSA) technology. Click and listen Microchips, Inspired by Nature!

Contact us

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