ACT® XT-1100

ACT^® XT-1100 etch residue remover and positive photoresist stripper is a fluoride containing chemistry formulated for removal of organic and highly oxidized etch residues. ACT® XT 1100 quickly and effectively removes etch residue and positive photoresist quickly and effectively removes etch residue and positive photoresist with minimal change on the critical dimensions of vias, metal lines, and trenches due to low oxide and metal etch rates.